Datasetpublic

ClarusC64/euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1

What this dataset tests Predict when overlay will breach specand route the minimal thermal control response. This is the third layer of projection optics thermo-mechanical decoupling: overlay drift scoreoverlay error growthfailure horizon forecastingthermal control routing Task Given current tool state, output: failure_horizon_wafersoverlay_risk_score (0..1)recommended_routing_actionminimal_fix_set Output format: float,float,string,string Example: 55,0.67,coolant… See the full description on the dataset page: https://huggingface.co/datasets/ClarusC64/euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1.

sourceHugging Facemitupdated 8mo agoView on Hugging Face

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Dataset Card

What this dataset tests

Predict when overlay will breach spec and route the minimal thermal control response.

This is the third layer of projection optics thermo-mechanical decoupling:

overlay drift score overlay error growth failure horizon forecasting thermal control routing

Task

Given current tool state, output:

failurehorizonwafers overlayriskscore (0..1) recommendedroutingaction minimalfixset

Output format: float,float,string,string

Example: 55,0.67,coolant retune,restore flow; verify delta-T

Inputs

—overlaydriftscore
—overlayerrornm
—overlayspecnm
—thermalmode1nm
—thermalmode2nm
—coolantflowlpm
—chambertempc

Targets

—failurehorizonwafers
—overlayriskscore
—recommendedroutingaction
—minimalfixset

Routing action options

—monitor
—reduce duty cycle
—redistribute illumination
—thermal pre-compensation
—coolant retune
—pause and stabilize
—illumination hardware check
—stop and service
—halt tool

Evaluation

Relative error on horizon Absolute error on risk Bonus for action match Bonus for fix-set overlap

Version

v0.1