ClarusC64/euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1

What this dataset tests Predict when overlay will breach specand route the minimal thermal control response. This is the third layer of projection optics thermo-mechanical decoupling: overlay drift scoreoverlay error growthfailure horizon forecastingthermal control routing Task Given current tool state, output: failure_horizon_wafersoverlay_risk_score (0..1)recommended_routing_actionminimal_fix_set Output format: float,float,string,string Example: 55,0.67,coolant… See the full description on the dataset page: https://huggingface.co/datasets/ClarusC64/euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1.