ClarusC64/euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
What this dataset tests When thermo-mechanical deformation stops predicting overlay error cleanly. This is the second layer of projection optics thermo-mechanical decoupling: deformation modesoverlay error growthcause-axis attribution Task Given deformation modes and overlay state, predict: overlay_drift_score (0..1)drift_flag (0/1)dominant_cause_axis Output format: float,int,string Example: 0.58,1,cooling Fields Inputs thermal_mode1_nm… See the full description on the dataset page: https://huggingface.co/datasets/ClarusC64/euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1.
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