ClarusC64/euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
What this dataset tests When thermo-mechanical deformation stops predicting overlay error cleanly. This is the second layer of projection optics thermo-mechanical decoupling: deformation modesoverlay error growthcause-axis attribution Task Given deformation modes and overlay state, predict: overlay_drift_score (0..1)drift_flag (0/1)dominant_cause_axis Output format: float,int,string Example: 0.58,1,cooling Fields Inputs thermal_mode1_nm… See the full description on the dataset page: https://huggingface.co/datasets/ClarusC64/euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1.
What this dataset tests
When thermo-mechanical deformation stops predicting overlay error cleanly.
This is the second layer of projection optics thermo-mechanical decoupling:
deformation modes overlay error growth cause-axis attribution
Task
Given deformation modes and overlay state, predict:
overlaydriftscore (0..1) driftflag (0/1) dominantcause_axis
Output format: float,int,string
Example: 0.58,1,cooling
Fields
Inputs
- thermalmode1nm
- thermalmode2nm
- thermalmode3nm
- overlayerrornm
- overlaywithinspec
- baseline_coherence
Targets
- overlaydriftscore
- drift_flag
- dominantcauseaxis
Cause axis meanings
thermal: global heating trend cooling: flow imbalance or coolant loss mount: clamp or support drift metrology: measurement/model mismatch contamination: absorbed power rise from fouling none: stable regime
Evaluation
Absolute error for drift score Bonus for correct drift flag Bonus for correct cause axis
Version
v0.1