ClarusC64/euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1

What this dataset tests Baseline coherence between: absorbed EUV power per projection mirrorcooling and thermal environmentresulting thermo-mechanical deformation modes This is the first layer needed to forecast overlay drift. Task Given power and environment inputs, predict: coherence_score A scalar 0..1 describing how predictable deformation is from absorbed power and thermal conditions. Inputs m1_absorbed_power_w m2_absorbed_power_w… See the full description on the dataset page: https://huggingface.co/datasets/ClarusC64/euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1.