ClarusC64/euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1
What this dataset tests Baseline coherence between: absorbed EUV power per projection mirrorcooling and thermal environmentresulting thermo-mechanical deformation modes This is the first layer needed to forecast overlay drift. Task Given power and environment inputs, predict: coherence_score A scalar 0..1 describing how predictable deformation is from absorbed power and thermal conditions. Inputs m1_absorbed_power_w m2_absorbed_power_w… See the full description on the dataset page: https://huggingface.co/datasets/ClarusC64/euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1.
What this dataset tests
Baseline coherence between:
absorbed EUV power per projection mirror cooling and thermal environment resulting thermo-mechanical deformation modes
This is the first layer needed to forecast overlay drift.
Task
Given power and environment inputs, predict:
coherence_score
A scalar 0..1 describing how predictable deformation is from absorbed power and thermal conditions.
Inputs
- m1absorbedpower_w
- m2absorbedpower_w
- m3absorbedpower_w
- m4absorbedpower_w
- coolantflowlpm
- chambertempc
- scandutycycle
Context outputs
- thermalmode1nm
- thermalmode2nm
- thermalmode3nm
Target
- coherence_score
Output format
Return a single float.
Example: 0.84
Evaluation
Absolute error scoring when ground truth exists. Format validity scored when ground truth is absent.
Version
v0.1