AISDL-SNU/LithoBench-PDE

LithoBench-PDE A benchmark dataset for PDE-based computational lithography simulation, constructed by generating high-fidelity 3D reference simulations for photomasks from the LithoBench dataset. Each sample contains intermediate 2D and 3D field data from the lithography simulation pipeline, providing ground-truth input-output pairs for three PDE learning tasks corresponding to three governing PDEs of photolithography. PDE Learning Tasks For each photomask, the… See the full description on the dataset page: https://huggingface.co/datasets/AISDL-SNU/LithoBench-PDE.