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reflectivity

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ClarusC64 /euv-collector-reflectivity-coherence-baseline-mapping-v0.1 What this dataset is This dataset models the baseline coherence between EUV source gas stability, collector mirror reflectivity, and transmitted EUV power. In a healthy lithography system, these variables move together in a tightly coupled manifold.Contamination begins as a subtle loss of correlation before throughput loss becomes visible. This dataset defines the clean-system coherence baseline. Task Given system metrics, estimate: coherence_score This score represents… See the full description on the dataset page: https://huggingface.co/datasets/ClarusC64/euv-collector-reflectivity-coherence-baseline-mapping-v0.1.tabulartabular-regressionn<1K0 likes8 downloads8mo agoHugging Face